Interesting diagram from ST Microelectronics' tutorial for MEMS microphones. You get some pretty good MEMS microphones with a ~70 dB SNR (compare with ~80 dB for a Neumann U87) and a near-flat frequency response. Their problem is the Helmholtz resonance. It varies considerably from capsule to capsule, so if you wanted to flatten that with a filter, you'd need to calibrate each capsule. Why don't they reduce the cavity volume to move that resonance into the ultrasonic range?
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Don Romano (alt) (thor@noagendasocial.com)'s status on Tuesday, 16-Apr-2019 06:48:49 EDT
Don Romano (alt)
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Don Romano (alt) (thor@noagendasocial.com)'s status on Tuesday, 16-Apr-2019 07:40:51 EDT
Don Romano (alt)
Upon further investigation, it seems that the Helmholtz resonance of MEMS microphones is affected by the diameter, length and material of the opening to that chamber.
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Don Romano (alt) (thor@noagendasocial.com)'s status on Tuesday, 16-Apr-2019 08:17:16 EDT
Don Romano (alt)
Paper on acoustical design for MEMS microphones:
https://www.edn.com/Pdf/ViewPdf?contentItemId=4429422
It looks to me like almost no matter what you do to the opening to the front chamber, you get a resonance somewhere in the 10-20 kHz area.
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